Ashok KP, Prakash RGKS and Rao KS*
MEMS accelerometers are one of the most common inertial sensors, a dynamic sensor capable of a vast range of sensing. The basic principle of operation behind the MEMS accelerometer is the displacement of a small proof mass etched into the silicon surface of the integrated circuit and suspended by small beams. MEMS accelerometers in Structural Health Monitoring systems can be able to measure the range of acceleration ± 4g with increasing sensitivity and decreasing cross sensitivity. In this paper, we have designed and simulated the MEMS capacitive comb drive accelerometer with respect to the vibrational frequency of the chest wall. The design consists of a proof mass (4000 μm × 6200 μm) with movable electrodes (2500 μm × 200 μm), fixed beam of electrodes (2500 μm × 200 μm) and a cantilever beam as a spring (1000 μm × 2000 μm). The Device operates in dynamic mode and simulated using COMSOL MULTIPHYSICS 5.2 version software. The output total displacement at 20 Hz is 1.52E-10 μm and at 40 Hz is 1.45E-9 μm, acceleration at 20 Hz is 9.63E-7 m/s2 and at 40 Hz is 9.19E-6 m/s2 is measured. The simulated results are correlated to the modeling results at the range of frequency 20 Hz–40 Hz.
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