Journal of Material Sciences & Engineering

Feng ZC

Publications

• Research Article
  Assessing Biaxial Stress and Strain in 3C-SiC/Si (001) by Raman Scattering Spectroscopy
  Author(s): Talwar DN, Wan L, Tin CC and Feng ZCTalwar DN, Wan L, Tin CC and Feng ZC
  
  Highly strained 3C-SiC/Si (001) epilayers of different thicknesses (0.1 μm-12.4 μm) prepared in a vertical reactor configuration by chemical vapor deposition (V-CVD) method were examined using Raman scattering spectroscopy (RSS). In the near backscattering geometry, our RSS results for “as-grown” epilayers revealed TO- and LO-phonon bands shifting towards lower frequencies by approximately ~2 cm-1 with respect to the “free-standing” films. Raman scattering data of optical phonons are carefully analyzed by using an elastic deformation theory with inputs of hydrostatic-stress coefficients from a realistic lattice dynamical approach that helped assess biaxial stress, inplane tensile- and normal compressive-strain, respectively. In each sample, the estimated value of strain is found at least two order of magnitude smaller than the one expected from lattice mi.. Read More»
  DOI: 10.4172/2169-0022.1000324

  Abstract PDF