Institute of Radiation Problems of Azerbaijan Nationale Academy of Science,
AZ1143, 9, B. Vahabzade str., Baku, Azerbaijan Republic
Serbia
Research Article
Determining the Amount of Hydrogen in Thin Films Well Si1-xGex: H (X = 0 ÷ 1) for Electronic Devices
Author(s): Najafov BA and RussiaNajafov BA and Russia
Possibilities of plasma chemical deposition of ??°-Si1-xGex:H (x=0 ÷ 1) films undoped and doped with PH3 or B2H6 have been analyzed from the viewpoint of their application in p-i-n structures of solar cell. The optical properties are considered, and the amount of hydrogen contained in those films is determined. The film properties are found to strongly depend on the film composition and the hydrogenation level. The number of hydrogen atoms in the films is varied by changing the gas mixture composition, and IR absorption in ??°-Si:H and ??°-Ge:H films is measured. The ??°-Si:H and ??°-Si0,88Ge1,2:H films were used to fabricate three-layer solar with an element area of 13 sm2 and an efficiency (ξ) of 9.5%... Read More»
DOI:
10.4172/2169-0022.1000295
Journal of Material Sciences & Engineering received 3677 citations as per Google Scholar report